Description
This integrated project establishes a comprehensive methodology for developing high-accuracy angular position sensors based on Tunnel Magnetoresistance (TMR) technology. By employing a Stoner-Wohlfarth macrospin model, the magnetic behavior of multilayer stacks is simulated to account for anisotropies and interlayer couplings, enabling performance prediction and design optimization. A Wheatstone bridge configuration with orthogonal reference layers is implemented to suppress harmonic distortions and generate orthogonal sine-cosine signals, facilitating full 360° angle reconstruction. The sensors are fabricated using a dedicated microfabrication process, including magnetron sputtering, lithography, and thermal annealing. Experimental characterization with a six-probe measurement system validates the design, demonstrating sinusoidal bridge outputs and a reconstructed angular error consistent with simulation trends. The work confirms TMR sensors as a robust platform for precision angular sensing and provides a validated framework for future performance enhancement and application-specific development.
| Field of Research/Work | Condensed Matter and Materials |
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